GF100 Series Thermal Mass Flow Controllers

Oct 17, 2013 5542
Designed for semiconductor, MOCVD and other gas flow control applications that require a high-purity, all-metal flow path, the Brooks GF100 Series mass flow controllers deliver outstanding performance, reliability and flexibility. The GF100 Series has been marathon-tested to over three times the semiconductor industry standard for reliability, ensuring repeatable low-drift performance over time.

Axetris Mass Flow Meter MFM 2150

Jan 11, 2016 4447
Compact mass flow meter with RS-485 full duplex interface, based on the proprietary Platinium MEMS technology from Axetris (MEMS: Micro Electro-Mechanical Systems). It offers the following advantages


Jul 09, 2014 7528
The TSI Mass Flowmeter 4040 can be used for a multitude of gas flow measurement applications. Whether measuring gas flows in a laboratory or manufacturing setting, TSI general purpose mass flowmeters provide accurate results with multiple data output options. The display versions come complete with accessories making setup and operation fast and convenient.