The MASS-VIEW®series operate on the principle of direct thermal mass flow measurement. A major advantage of using this type of sensor is that the instruments measure direct mass flow, without the need for temperature and pressure correction.
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IN-FLOW Select Series Mass Flow Meters/Controllers are thermal, bypass-type, mass flow meters of modular construction with a ‘industrial style’ pc-board housing. Control valves can either be integrally or separately mounted, to measure and control gas flows
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Multiple gases in one device equals maximum process flexibility and productivity. The GF40 Series elastomer sealed mass flow controllers and meters with Brooks Instrument’s exclusive MultiFlo™ technology provide the perfect choice for systems, processes and facilities that use a variety of gases, change gas types frequently or need to re-range while preserving gas measurement and
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For the past 15 years, EESIFLO® http://www.eesiflo.com has helped thousands of plant operators, engineers and technicians successfully measure the flow of all possible fluids through every type of pipe from 1/2 inch to 100 inches in diameter, without cutting into their pipes or shutting down their processes. The term “downtime” is not part of our
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Brooks Instrument’s SLA5800 Series is an elastomer sealed digital thermal mass flow measurement and control instrument, which offers unparalleled flexibility and performance. The SLA5800 Series MFC is designed for use in advanced gas handling systems. The result is the most accurate, repeatable, and responsive MFC on the market today!
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The 4800 Series MEMS-based sensor provides lightning fast response times. The 4800 Series utilizes a Micro Electro Mechanical System (MEMS) based thermal sensor. Similar to typical thermal sensors, it measures a change in temperature to determine mass flow rate. The difference is that gas flows directly across the sensor, achieving extremely fast response times.
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The Quantim family of Coriolis mass flow meters and flow controllers uses a proven mass flow measurement technology to provide direct mass flow measurement and control of liquids and gases that has been employed in a wide variety of markets and applications for more than 15 years.
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Designed for the next step in semiconductor etch, thin film and other advanced process gas control applications, the GF135 combines all of the benefits provided by the most advanced pressure transient insensitive mass flow controller (MFC) and adds real-time flow error detection with advanced diagnostics.
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The Brooks® Models BM04, BM07, BM10, BM40 and BM50 are positive displacement oval gear flowmeters designed for applications requiring high accuracy measurement of clean liquids with viscosity’s less than 1000 cP standard, or up to 1 million cP with rotors (gears) cut for high viscosity. All meters are available with a pulse output from a
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The Brooks BM01 and BM02 are low flow positive displacement oval flowmeters designed for applications requiring the high accuracy measurement of clean liquids with viscosities less than 1000 Cp. Units are available with a pulse output from a Reed switch or solid state Hall effect switch for remote registration and/or totalization.
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