The 4800 Series MEMS-based sensor provides lightning fast response times. The 4800 Series utilizes a Micro Electro Mechanical System (MEMS) based thermal sensor. Similar to typical thermal sensors, it measures a change in temperature to determine mass flow rate. The difference is that gas flows directly across the sensor, achieving extremely fast response times.
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Thermal Mass Flow meter and Mass Flow Controller 4800 Series
Overview
The 4800 Series MEMS-based sensor provides lightning fast response times. The 4800 Series utilizes a Micro Electro Mechanical System (MEMS) based thermal sensor. Similar to typical thermal sensors, it measures a change in temperature to determine mass flow rate. The difference is that gas flows directly across the sensor, achieving extremely fast response times.
Features
- Fast response time
- Compact size
- Optional Local Operator Interface (LOI)
- Low pressure drop across the sensor
- Variety of analog and digital I/O
- Fully RoHS compliant
- Storage of up to 9 selectable gas calibrations
