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GF135 Advanced Diagnostics Animation

GF135 Advanced Diagnostics Thermal Mass Flow Controller Animation
GF135 Advanced Diagnostics Thermal Mass Flow Controller Animation
revolutionary pressure transient insensitive (PTI) mass flow controller for semiconductor manufacturing. 

GF135 Advanced Diagnostics Thermal Mass Flow Controller Animation

BROOKS INSTRUMENTS

The GF135 improves yield and uptime with real-time integral rate-of-decay flow measurement. “Smarter” advanced diagnostic capabilities let users verify accuracy, check valve leak-by, and monitor sensor drift without stopping production of wafers.

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