|GF135 Advanced Diagnostics Thermal Mass Flow Controller Animation
|revolutionary pressure transient insensitive (PTI) mass flow controller for semiconductor manufacturing.
GF135 Advanced Diagnostics Thermal Mass Flow Controller Animation
The GF135 improves yield and uptime with real-time integral rate-of-decay flow measurement. “Smarter” advanced diagnostic capabilities let users verify accuracy, check valve leak-by, and monitor sensor drift without stopping production of wafers.