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| GF135 Advanced Diagnostics Thermal Mass Flow Controller Animation |
| revolutionary pressure transient insensitive (PTI) mass flow controller for semiconductor manufacturing. |
GF135 Advanced Diagnostics Thermal Mass Flow Controller Animation |
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The GF135 improves yield and uptime with real-time integral rate-of-decay flow measurement. “Smarter” advanced diagnostic capabilities let users verify accuracy, check valve leak-by, and monitor sensor drift without stopping production of wafers. |