EL-FLOW® Select Series Mass Flow Meters/Controllers are thermal mass flow meters of modular construction with a ‘laboratory style’ pc-board housing. Control valves can either be integrally or separately mounted, to measure and control gas flows
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EL-FLOW Select Mass Flow Controller
Overview
EL-FLOW® Select Series Mass Flow Meters/Controllers are thermal mass flow meters of modular construction with a ‘laboratory style’ pc-board housing. Control valves can either be integrally or separately mounted, to measure and control gas flows
Features
- High accuracy (standard 0,5% Rd plus 0,1% FS)
- Rangeability in digital mode up to 1:187,5
- Fast response (down to 500 msec), excellent repeatability
- Optional Multi-Gas / Multi-Range functionality: freely programmable ranges and gas types
- Pressure ratings 64 / 100 bar (Multi-Gas / Multi-Range functionality up to 10 bar)
- High pressure versions available
- Analog I/O-signals, RS232-connection; optional on-board fieldbus interface
- Electro-chemical polishing of all surfaces
- Compact, modular construction
- Metal sealed and/or down-ported versions available
