Brooks Instrument’s SLA5800 Series is an elastomer sealed digital thermal mass flow measurement and control instrument, which offers unparalleled flexibility and performance. The SLA5800 Series MFC is designed for use in advanced gas handling systems. The result is the most accurate, repeatable, and responsive MFC on the market today!
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Thermal Mass Flow meter and Mass Flow Controller SLA5800 Series
Overview
Brooks Instrument’s SLA5800 Series is an elastomer sealed digital thermal mass flow measurement and control instrument, which offers unparalleled flexibility and performance. The SLA5800 Series MFC is designed for use in advanced gas handling systems. The result is the most accurate, repeatable, and responsive MFC on the market today!
Features
- Wide FS flow range for measurement and control of gases from 3 ccm to 2500 lpm (N2equivalent)
- Accuracy up to 1200 lpm: ±1.0% of rate (20%-100%FS) ±0.2% FS (below 20% FS)1200-2500 lpm: ±1% FS including linearity.(at calibration conditions).
- Industry leading sensor stability. Long term drift performance of 0.2% per year. Increased system throughput by reducing maintenance and eliminating periodic recipe adjustment.
- Storage of up to 10 selectable calibration curves. Spares inventories are reduced by limiting the number of individual MFC/M’s required, lowering inventory holding costs.
- Elastomer downport process connection option conforms to ANSI/ISA SP-76 standard to offer simplified installation and maintenance in an efficient footprint.
