Semiconductor Flow meter


Extreme-Temperature Flow Meters 8000XHT Series

Jan 25, 2018 150
Extreme-Temperature Flow Meters 8000XHT Series
Innovative technology and design, for use with liquid temperatures to 200 °C 8000XHT Series flow meters provide accurate, reliable, and cost-effective measurement of heat transfer fluids and other liquids to 200 °C. The high-temperature capability is enhanced by Proteus’ world-class calibration expertise, to deliver superior precision and reliability in flow and temperature measurement for critical heat-sensitive processes.

Digital Mass Flow Controller GF135

Oct 17, 2013 1777
Designed for the next step in semiconductor etch, thin film and other advanced process gas control applications, the GF135 combines all of the benefits provided by the most advanced pressure transient insensitive mass flow controller (MFC) and adds real-time flow error detection with advanced diagnostics.

MFC Plus - New

Nov 24, 2016 514
This mass flow meter is designed for full scale flows up to 15,000 sccm. Main features are an unmatched dynamic range and compact size.

Axetris Mass Flow Meter MFM 2150

Jan 11, 2016 601
Compact mass flow meter with RS-485 full duplex interface, based on the proprietary Platinium MEMS technology from Axetris (MEMS: Micro Electro-Mechanical Systems). It offers the following advantages

Axetris Mass Flow Meter MFM 2250

Nov 24, 2016 1217
Small compact mass flow meter module with RS-485 full duplex interface, based on the proprietary Platinium MEMS technology from Axetris (MEMS: Micro Electro-Mechanical Systems).