Direct Liquid Injection Vaporizer Systems

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Direct Liquid Injection Vaporizer Systems

Brooks Instrument

Direct Liquid Injection Vaporizer Systems

Direct Liquid Injection Vaporizer Systems Overview

The Brooks family of extremely high-performing direct liquid injection (DLI) vaporizer solutions is designed for customers who require reliable liquid vaporization. Featuring unique atomization and heat exchanger technologies, these vapor delivery systems deliver pure vapor for every application. Applications include:

Direct Liquid Injection Vaporizer Systems Features

  • Water vaporization for fuel cell stack humidification and many other water addition applications
  • Liquid precursor vaporization for chemical vapor deposition (CVD), metal oxide chemical vapor deposition (MOCVD), and atomic layer deposition (ALD)
  • Depositing thin films for enhanced thermal, optical, or hardness characteristics such as diamond-like carbon coating and glass coating
  • Vaporizing monomers for vacuum polymer film deposition
  • Generating calibration vapor
  • Vaporizing liquid hydrocarbons
  • Many more