GF100 Series Thermal Mass Flow Controllers

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GF100 Series Thermal Mass Flow Controllers & Thermal Mass Flow Meters

Brooks Instrument

GF100 Series Thermal Mass Flow Controllers & Thermal Mass Flow Meters

GF100 Series Thermal Mass Flow Controllers & Thermal Mass Flow Meters Overview

Designed for semiconductor, MOCVD and other gas flow control applications that require a high-purity, all-metal flow path, the Brooks GF100 Series mass flow controllers deliver outstanding performance, reliability and flexibility. The GF100 Series has been marathon-tested to over three times the semiconductor industry standard for reliability, ensuring repeatable low-drift performance over time.

GF100 Series Thermal Mass Flow Controllers & Thermal Mass Flow Meters Features

  • Ultra-fast 300-millisecond settling time
  • Optional pressure transient insensitive (PTI), high accuracy and safe delivery system models available
  • MultiFlo™ gas and range configurability
  • Corrosion-resistant Hastelloy® sensor tube and valve orifice (jet)