Thermal Mass Flow meter 4800 Series

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Thermal Mass Flow meter and Mass Flow Controller 4800 Series

Brooks Instrument

 
Thermal Mass Flow meter and Mass Flow Controller 4800 Series

Thermal Mass Flow meter and Mass Flow Controller 4800 Series Overview

The 4800 Series MEMS-based sensor provides lightning fast response times. The 4800 Series utilizes a Micro Electro Mechanical System (MEMS) based thermal sensor. Similar to typical thermal sensors, it measures a change in temperature to determine mass flow rate. The difference is that gas flows directly across the sensor, achieving extremely fast response times.

Thermal Mass Flow meter and Mass Flow Controller 4800 Series Features

  • Fast response time
  • Compact size
  • Optional Local Operator Interface (LOI)
  • Low pressure drop across the sensor
  • Variety of analog and digital I/O
  • Fully RoHS compliant
  • Storage of up to 9 selectable gas calibrations